Electron-beam-induced deposition of platinum at low landing energies
نویسندگان
چکیده
منابع مشابه
Electron-beam-induced deposition of platinum from a liquid precursor.
We demonstrate here the first focused electron-beam-induced deposition (EBID) of nanostructures using a liquid precursor. We have deposited sub-50 nm platinum (Pt) wires and dots from a dilute, aqueous solution of chloroplatinic acid. Existing EBID processes rely on the electron-beam stimulated decomposition of gaseous precursors; as a result, the deposits are highly contaminated (up to 75 at. ...
متن کاملElectron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition
Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of th...
متن کاملInvestigation of morphological changes in platinum-containing nanostructures created by electron-beam-induced deposition
Focused electron-beam-induced deposition EBID allows the rapid fabrication of three-dimensional nanodevices and metallic wiring of nanostructures, and is a promising technique for many applications in nanoresearch. The authors present two topics on platinum-containing nanostructures created by EBID. First, they report on a TEM study of the microstructure of nanodeposits created from Pt PF3 4. T...
متن کاملEnhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum.
We introduce a laser assisted electron beam induced deposition (LAEBID) process which is a nanoscale direct write synthesis method that integrates an electron beam induced deposition process with a synchronized pulsed laser step to induce thermal desorption of reaction by-products. Localized, spatially overlapping electron and photon pulses enable the thermal desorption of the reaction by-produ...
متن کاملLow-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM
Focused-electron-beam-induced deposition (FEBID) is used as a direct-write approach to decorate ultrasmall Pt nanoclusters on carbon nanotubes at selected sites in a straightforward maskless manner. The as-deposited nanostructures are studied by transmission electron microscopy (TEM) in 2D and 3D, demonstrating that the Pt nanoclusters are well-dispersed, covering the selected areas of the CNT ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 2008
ISSN: 1071-1023,1520-8567
DOI: 10.1116/1.2976576